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Liquid
Introduction

Liquid is the designation given by ISI to a series of nonelectrical Feedthrough products designed specifically for the transmission of fluids and gases into high and ultrahigh vacuum environments.

ISI offers two product categories: Water Feedthroughs and Liquid Nitrogen Feedthroughs.


Liguid Feedthroughs Group

Water Feedthroughs
Tube Weld Del-Seal™ CF    Kwik-Flange™ KF    Baseplate Mount   Weldable
Swagelock® Del-Seal™ CF    Kwik-Flange™ KF    Baseplate Mount
  VCR Del-Seal™ CF    Kwik-Flange™ KF    Baseplate Mount

Liquid Nitrogen Feedthroughs
Tube Weld Del-Seal™ CF    Kwik-Flange™ KF    Baseplate Mount   Weldable
Swagelock® Del-Seal™ CF    Kwik-Flange™ KF    Baseplate Mount
  VCR Del-Seal™ CF    Kwik-Flange™ KF    Baseplate Mount

Water Feedthroughs are used to transfer coolant to processing equipment inside a vacuum. For example, Electron Beam evaporation sources must be in a high vacuum environment and generating a densely focused electron beam to produce enough heat to evaporate Alumina ceramics; water cooling is therefore required to prevent damage to evaporation crucibles and electromagnetic coils used respectively to contain the molten alumina and focus the electron beam. 

Liquid Nitrogen Feedthroughs are used for the same cooling purposes as Water Feedthroughs but offer lower temperature (-200°C) capabilities and therefore greater cooling rates. Liquid Nitrogen Feedthroughs are designed so as to minimize heat transfer between coolant lines and vacuum mounts. Ice build up can be detrimental to the sealing characteristics of a vacuum mount.

Thermal insulation in liquid nitrogen lines is achieved through double wall coaxial construction. A .25 inch cooling line is inserted and welded to one end of a 1/2 inch support tube. The opposite end of the 1/2 inch support tube is welded to the vacuum mount which, when evacuated, creates a coaxial vacuum cavity between the two tubes. This cavity is an excellent thermal barrier, which prevents ice build up on the air side of the vacuum mount.

Both Water and Liquid Nitrogen Feedthroughs are available in one of three vacuum mount styles, Del-Seal CF, ISO NW Kwik-Flange and 1 inch Base Plate. In addition to these three mounts, ISI offers individual Liquid Feedthrough tube kits for direct welding into a customers chamber or custom flange. These kits are supplied in weld tube form only, without fittings.

Vacuum mount fitted, Water and Liquid Nitrogen Feedthroughs are constructed with .25 inch, type 304 stainless steel tubing with a choice of three industry standard fittings, Weld-tube (plain tubes without fittings), .25 inch Swagelok® compression fittings or .25 inch male VCR® metal gasket seal fittings. Mating VCR female nuts and metal copper gaskets must be purchased separately.

 


INTENDED OPERATING CONDITIONS
Electrical ratings are determined by various factors, including dielectric strength, geometry and system operating pressure. Please note that all ISI catalog products are electrically rated for operation with one side in dry atmospheric conditions and the other side in a vacuum environment with a maximum system
pressure of 1 x 10-4 Torr. We advise that users make allowances for deviations from stated operating parameters and take adequate safety precautions when feedthroughs are operated at high voltages or high currents.