Water Feedthroughs are used to transfer coolant to processing equipment inside a vacuum. For example, Electron Beam
evaporation sources must be in a high vacuum environment and generating a densely focused electron beam to produce enough
heat to evaporate Alumina ceramics; water cooling is therefore required to prevent damage to evaporation crucibles and
electromagnetic coils used respectively to contain the molten alumina and focus the electron beam.
Liquid Nitrogen Feedthroughs are used for the same cooling purposes as Water Feedthroughs but offer lower temperature
(-200°C) capabilities and therefore greater cooling rates. Liquid Nitrogen Feedthroughs are designed so as to minimize heat
transfer between coolant lines and vacuum mounts. Ice build up can be detrimental to the sealing characteristics of a
vacuum mount.
Thermal insulation in liquid nitrogen lines is achieved through double wall coaxial construction. A .25 inch cooling line is
inserted and welded to one end of a 1/2 inch support tube. The opposite end of the 1/2 inch support tube is welded to
the vacuum mount which, when evacuated, creates a coaxial vacuum cavity between the two tubes. This cavity is an excellent
thermal barrier, which prevents ice build up on the air side of the vacuum mount.
Both Water and Liquid Nitrogen Feedthroughs are available in one of three vacuum mount styles, Del-Seal CF, ISO NW
Kwik-Flange and 1 inch Base Plate. In addition to these three mounts, ISI offers individual Liquid Feedthrough tube kits for
direct welding into a customers chamber or custom flange. These kits are supplied in weld tube form only, without fittings.
Vacuum mount fitted, Water and Liquid Nitrogen Feedthroughs are constructed with .25 inch, type 304 stainless steel tubing
with a choice of three industry standard fittings, Weld-tube (plain tubes without fittings), .25 inch Swagelok® compression
fittings or .25 inch male VCR® metal gasket seal fittings. Mating VCR female nuts and metal copper gaskets must
be purchased separately.
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